" PMMA is commonly used as a high resolution positive resist for direct write e-beam offering extremely high-resolution, ease of handling and excellent film characteristics available in package sizes from 500 ml to 20 liters. PMMA is also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacrificial layer. "

Applications

PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications.PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as X-ray and deep UV microlithographic processes

Technical Specifications