Pcos 200s

The Pcox 200 S is one of those modules used in stand-alone form for process development having unique quick exchange of platen, polishing carriers and conditioning tools. It is Small, easy-to-use and robust with a standard of 200 mm and compatibility 4 “to 8”.


Some of the applications can be listed as- in polishing of different metals
polishing of different insulators, doped and undoped oxides
of silicon packaging and optoelectronic components;

Technical Specifications