Navio RF Matching Networks

Experience simplicity and high reliability in a single, affordable package. The Navio™ matching network leverages our power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual Front Panel software is available for monitoring.

Applications

    Deposition
    Etch
    Flat Panel Display
    Glass Coating
    Industrial Coatings
    Semiconductor Manufacturing
    Solar Photovoltaics

Technical Specifications