Topsil Micro-Electro-Mechanical Systems(MEMS)silicon wafers are characterised by large flexibility in terms of bulk properties and wafering. The Micro-Electro-Mechanical Systems(MEMS) silicon wafers have excellent resistivity tolerances and very low leves of performance degrading impurities and are available as float zone or Czochralski wafers in dia of up to 150mm.


Topsil Micro-Electro-Mechanical Systems(MEMS)silicon wafers which are based on float zone material have no oxygen in the bulk which make them an excellent choice for power MEMS components, high efficiency microstructured solar cells, photodiodes, and RF MEMS devices. Micro-Electro-Mechanical Systems(MEMS)Silicon wafers based on Czochralski material are particularly suitable for high volume components such as MEMS accelerometers and MEMS microphones.

Technical Specifications