Materials - Photomasks - Master Photomasks |


Master Photomasks

  • Typically, these photomasks contain the “Full Image” or “Array” of the final wafer and are exposed in a single exposure or scan.
  • As such, the resolution is limited to around 1um-2um but, for many mature, or even some emerging technologies, this is sufficient and provides good throughput.

              Master Photomasks

Sizes                 Substrate  Thickness Available to Substrate
3”          Quartz            Soda Lime  0.06”
4''  Quartz            Soda Lime  0.06”/0.09” Qz Only
5''  Quartz            Soda Lime  0.09”
6"  Quartz            Soda Lime  0.12”/0.25” Qz Only
7?  Quartz            Soda Lime  0.12”/0.15” Qz Only
7.25R  Quartz            Soda Lime  0.15”
8?   0.12”
9? Borofloat/Quartz    Soda Lime 0.12”
14? Borofloat        Soda Lime 0.12”/0.19” QZ Only
16? Quartz            Soda Lime 0.12?


 

 

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