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Wafer Grinding and Polishing
Chemical Mechanical Polishing
Acoustic Scanning Microscope
Thin film Measurement
In-situ Alignment Wafer Bonding System
Spray Solvent Tools
Spin Rinse Dryers
Negative photoresist series well suited for e-beam and deep UV exposure in the manufacturing of semiconductor devices.
Mfr: KAYAKU (MICROCHEM)
Acrylate-based positive tone resist for high resolution e-beam lithography
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