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Wafer Grinding and Polishing
Chemical Mechanical Polishing
Acoustic Scanning Microscope
In-situ Alignment Wafer Bonding System
Spray Solvent Tools
Spin Rinse Dryers
PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications,
Copolymer resists are based on a mixture of PMMA and ~8.5% methacrylic acid.
Mfr: KAYAKU (MICROCHEM)
PMGI and LOR resists enable high yield, metal lift-off processing in a variety of applications from data storage and wireless ICs, to MEMS.
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