EMA-400 Mask Aligner

EMA-400 Mask Aligner

Company: Union Optical Co. Ltd., Japan

FEATURES

Wafer Size: up to 4” dia
Economical, Compact & Hi-Level Performance
Viewing fused image of two alignment marks in the field of view.
Integrator lens for exposure.
LED illuminator

APPLICATIONS

(Micromachine development in R&D center and university)
Acuator, Pressure Sensor, Acceleration Sensor, Power Device, etc.
Exposure for Flip Chip/BGA/CSP.
Exposure for Optical/High Speed Communication Components.